Removing underfill in your devices, whether they are 2.5D/3D advanced packages, flipchips etc, enables further analysis on your samples, but can be quite challenging using traditional chemical processes.
As demonstrated in many of our recent papers, our MIP & MIP+ systems can etch UnderFill (UF) material in various locations on the package to expose & preserve various materials, including:
โ the ฮผbump chains in the interposer
โ HBM overmold
โ Solder balls
โ Cu RDL
Our industry leadership in underfill etching, is due to the unique advantages of JIACO Instrumentโs MIP systems:
โ Atmospheric, CFโ-free plasma for decapsualtion/UF etching
โ High selectivity
โ No artifacts introduced to your sample
Allowing you to perform your analysis of the sample right the first time.
๐ฅ๐ฒ๐ฎ๐ฑ ๐บ๐ผ๐ฟ๐ฒ ๐ฎ๐ฏ๐ผ๐๐ ๐ต๐ผ๐ ๐๐ต๐ฒ ๐ ๐๐ฃ ๐ต๐ฎ๐ป๐ฑ๐น๐ฒ๐ ๐๐ป๐ฑ๐ฒ๐ฟ๐ณ๐ถ๐น๐น ๐ฒ๐๐ฐ๐ต๐ถ๐ป๐ด:
https://jiaco-instruments.com/istfa-2020/ย
https://ieeexplore.ieee.org/document/10249167ย
https://www.researchgate.net/publication/348813806_Benefits_of_using_a_CF4-Free_Microwave_Induced_Plasma_MIP_Spot_Etch_Process_to_Remove_Underfill_and_Analyze_25D_Modulesย
https://dl.asminternational.org/istfa/proceedings-abstract/ISTFA2024/84918/496/33010
https://www.researchgate.net/publication/385304985_FA_Challenges_and_Case_Study_Exploration_of_Multidie_Fan-Out_Wafer_Level_Packagesย
https://dl.asminternational.org/edfa-tech/article-abstract/23/4/14/20627/Methods-to-Enable-Fault-Isolation-on-2-5D-Molded?redirectedFrom=fulltextย
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